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Applications |
| Consumer demand for increased speed, power and integration in computing and electronic devices drives semiconductor manufacturers to scale the size of transistors in integrated circuits smaller and smaller in order to pack more performance onto a single chip. As transistor sizes get smaller, due to the limits of physical scaling, manufacturers are encountering a proliferation of manufacturing problems at each process node. This has resulted in an era of effective scaling, wherein the engineering of nanophysical properties takes the central role. PMPR provides the means to measure and control these properties within a shrinking process window, resulting in maximum yield. |
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