Company

Xitronix Corporation is a leader in the development and implementation of high precision Polarization Modulation Photo-Reflectance ("PMPR") metrology equipment for the worldwide semiconductor device manufacturing process control market.

PMPR technology provides process engineers the unprecedented capability to measure strain and active dopant in nanoscale silicon structures. Direct sensitivity to active electronic properties of nanostructures is a high priority need in IC manufacturing. To enable precision measurement of electronic properties of device nanostructures in a production environment, Xitronix offers fully automated laser-based PMPR systems with available one micron focal spot size. This provides for precise and repeatable results on nanoscale strained silicon and activated USJ structures. Morever, with Xitronix' pioneering use of a spectroscopic laser probe, very high speed measurements are obtained while maintaining system simplicity.

The breakthrough process control capability provided by Xitronix' PMPR technology is essential to the volume manufacture of nanoelectronics at the 45 nm node and beyond.

Xitronix Corporation

3925 West Braker Lane

Suite 3.8041

Austin, Texas 78759

512 476 1553 phone

512 476 1113 fax
 

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