Xitronix' Photo-Modulation Reflectance (PMR) systems provide process control for advanced dopant activation and strained silicon processes. The Xitronix platforms fully support industry automation requirements and meet SEMI standards.
- Precise, non-destructive characterization of dopant activation in Ultra-Shallow Junctions
- Precise, non-destructive measurement of strain in ultra-thin strained Si layers
- Process control for Laser Anneal
- Process control for Strained Si/SiGe
- Process control for crystallization in monolithic 3DIC
- On-product measurement capability on SIMS boxes, test structures and patterned features