Xitronix' Photo-Modulation Reflectance (PMR) systems provide process control for advanced dopant activation and strained silicon processes. The Xitronix platforms fully support industry automation requirements and meet SEMI standards.


Product overview

  • Precise, non-destructive characterization of dopant activation in Ultra-Shallow Junctions
  • Precise, non-destructive measurement of strain in ultra-thin strained Si layers
  • Process control for Laser Anneal
  • Process control for Strained Si/SiGe
  • Process control for crystallization in monolithic 3DIC
  • On-product measurement capability on SIMS boxes, test structures and patterned features
© 2006-2015 Xitronix. All Rights Reserved  |  Site Map  |  home  |  company  |  applications  |  products  |  sales  |  support  |  press  |  careers  |  contact