The Xitronix XP700 System is a high throughput, fully automated 300 mm measurement system designed to meet the process control requirements of advanced semiconductor manufacturers. The XP700 incorporates the proven dopant activation and strain measurement capabilities of the Xitronix PMR technology in a fully automated platform suited for real-time process control of advanced semiconductor manufacturing processes. Features include a GUI which allows users to define recipes for R&D and process control of dopant activation and strained silicon processes. Precise tool matching and repeatability are achieved through the use of auto-balanced detection and robust calibration protocols. Pump and probe beam wavelength options provide excellent process control capability on virtually any active Si structure, including 3DIC and SOI layers. Xitronix' fully automated XP700 System provides true process control capability for semiconductor electronic properties in an advanced manufacturing environment.